EMS DC Power Supply
| Axcelis P/N |
Description |
Model |
1204990
(2100185) |
ARC PS NV20A |
EMS-100-10 |
1205000
(2100188) |
FILAMENT PS NV20A |
EMS-7.5-300 |
1214110
(2100266) |
IHC FILAMENT PS |
EMS-10-60 |
1214120
(2100267) |
IHC ARC PS |
EMS-150-7 |
1214130
(2100268) |
IHC CATHODE PS |
EMS-600-1.6 |
| 1214460 |
P-SHOWER FILAMENT PS |
EMS-5-200 |
| 2100222 |
SOURCE MAGNET PS |
EMS-25-25 |
| 2100236 |
AMU PS |
EMS-40-150 |
| 2100221 |
FEM PS(2EA) |
EMS-30-165 |
